mdx 系列10 kw电源在真空环境中经久耐用,其小巧的尺寸使其成为实验室系统的理想解决方案。它们最常用作直流磁控溅射电源;在该领域,二者精密的调节性能、一流的灭弧功能和较低的存储输出能量使之成为业界领先产品。它们还在射频溅射和蚀刻系统中被用作精密调节的偏压电源。
ae mdx直流磁控溅射电源:
equipment details: dc magnetron sputtering
power supply
used as dc magnetron sputtering drives where regulation, superior arc quenching
and low output energy are required
standard z
power output: 10 kw
regulation: 0.25 percent in all modes, power, current, voltage
remote panel controller
208v, 3 ph, 50/60 hz,